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ʽPECVD
  • ʽPECVD

˹Ů,ŷͼƬר18p,ͼƬ

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PECVD xwWշeO䣬ølԴx늮b˹Ů,ŷͼƬר18p,ͼƬxwWe^ʩӰ푵ļgӺxӵܶ_ 1091012/cm3ƽ_110evڵxwڣMwӵķֽ⡢ϡlxM˹Ů,ŷͼƬר18p,ͼƬԻFɣĶeضȡPECVD 200桫500湠ȳĤhС CVD 700桫950湠ȳĤڰl£˻ԻĔUɢĶ߱˹Ů,ŷͼƬר18p,ͼƬĤLٶȺ;ԡe^УڴĚڣ𵽱gá Ԕ1
  • 1bܴ󣬆Ƭɱ
    ç450mm܏ķǻЮbܴ󡢆Ƭɱ١ˇܼѵăc̨4O156ƬĮbܿ_18˹Ů,ŷͼƬר18p,ͼƬ00Ƭ/Сrÿ308Ƭ/ͬr240Ƭ/280Ƭ/Įb(Cb½)

    (1)

    2Ԅӻ̶ȸ
    ȫԄϵyһIȫԄӹˇԄӻ˹Ů,ŷͼƬר18p,ͼƬ̶ȵˮbƷ}Ժһԡ
    3߾Ȝضȿ
    аlOӋĠtw߾ζ˹Ů,ŷͼƬר18p,ͼƬp·ضȿϵy؜ٶȿ죬ƾȾ̎ڇIȵλ
    4IIȵ͉ϵy

    (2)

    аlȫԄӾ]hض˹Ů,ŷͼƬר18p,ͼƬƼgƾԼr푑30%ϵyӸЧߣǻոӾ
  • 2
  • 1ĤN    
    2bƬߴ缰bƬ   156x156mmƬ308Ƭ/
    3Ĥ    Ƭȡܡ3% Ƭgܡ3% gܡ2%Ĥ80nmңʴ2.04
    4tЧȏ  475mm (ʯӢ⏽450mm)
    5ضȿƹ    300600棻

    (3)

    6؅^Lȼȣ  2/1450mm500棩
    7ؕrg     RT45040min
    8ϵyOգ       3Pa
    9;ȣ     50 Pa3005Pa]hƣ
    10ԣ     ©ʡ110-7pa.m3/s
  • Ŀǰ̫늳ИIҪPECVDOշepgĤ
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